| 摘要 |
PURPOSE:To obtain a medium having a small coefft. of friction, good travelling property and excellent recording/reproducing characteristics by incorporating fluorine into a carbon film on a recording film formed on a supporting body. CONSTITUTION:A Co magnetic film of 1500Angstrom thickness is formed by depositing Co particles on a PET film of 10mum thickness with using a general oblique vapor deposition device. Then a diamond-like carbon thin film having C-F bonds is formed on the Co magnetic film by using a general microwave ECR plasma CVD device and supplying CF. The diamond-like carbon thin film having C-F bonds is formed under conditions of 5 sccm flow amt. of CF4, 400W microwave output, and 3X10<-3>Torr vacuum degree. The diamond-like carbon thin film is formed to 100Angstrom thickness. Then, a 1/2-inch wide magnetic tape for broadcasting is obtd. in a general process. By this method, the obtd. medium has good durability and hardly causes damage in a head or the recording medium itself. |
