| 摘要 |
PURPOSE:To improve the workability of target member exchanging work, to continuously generate X rays for a long time, and to reduce the size and cost of a vacuum vessel by providing an introducing section and vacuum holding means to a target supplying means and the vacuum vessel. CONSTITUTION:Rubber rollers 110a and 110b are formed of an elastic material and tightly attached to the surface of a tape-like target 109 without gap so as to substantially prevent the flowing of air, etc., into a vacuum vessel from the contact areas of the rollers 110a and 110b. Since the target 109 is continuously introduced from the outside, X rays can be continuously generated for a long time. In addition the target 109 can be replaced without stopping an X-ray generator by replacing a reel 102 and all and additionally connecting a new target 109 to the end of the old tape. Since a vacuum vessel 101 has a remarkably small internal volume and the relative performance of a vacuum pump is improved, the inside of the vessel 101 is substantially maintained in a vacuum stage even when a very small amount of air, etc., flows in the vessel 101 from the contact areas of the rollers 110a and 110b. |
