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发明名称
Hiukkaslähde reaktiivista ionisäde-etsaus- tai plasmakerrostuslaitteistoa varten
摘要
申请公布号
FI95340(B)
申请公布日期
1995.09.29
申请号
FI19890000497
申请日期
1989.02.02
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
KATZSCHNER, WERNER;EICHHOLZ, STEFAN;GEISLER, MICHAEL;JUNG, MICHAEL
分类号
H05H1/18;C23F4/00;H01J37/08;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H05H1/46;C23C14/34;H01J27/18;H01J37/147
主分类号
H05H1/18
代理机构
代理人
主权项
地址
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