申请人 |
SUMITOMO CHEMICAL CO., LTD., OSAKA, JP;SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
YAMAMOTO, KEISAKU, ICHIHARA-SHI, CHIBA 299-01, JP;YOSHIDA, NOBUYUKI, ICHIHARA-SHI, CHIBA 299-01, JP;TSUJI, MITSUJI, ICHIHARA-SHI, CHIBA 299-01, JP;USUDA, EIICHI, ICHIHARA-SHI, CHIBA 229-01, JP;FUKUDA, TAKESHI, ANNAKA-SHI, GUNMA 379-01, JP;NAKAMURA, TSUTOMU, ANNAKA-SHI, GUNMA 379-01, JP |