ELECTROSTATIC LEVITATION CONVEYOR AND ELECTROSTATIC LEVITATION ELECTRODES THEREOF

摘要

An electrostatic levitation electrode (10) is divided equally into four parts on a disk-like insulating substrate (4) with separation bands (11a, 11b) between them. A positive voltage and a negative voltage are alternately applied to these four fan-shaped electrodes (10a, 10b, 10c, 10d). A round (13) is formed at the corner of each fan-shaped electrodes (10a, 10b, 10c, 10d), and lead wires (12a, 12b, 12c, 12d) are connected to the outer side surfaces of the fan-shaped electrodes (10a, 10b, 10c, 10d), respectively. Accordingly, damage of the electrodes at the lead portions can be eliminated, maximum attraction force and levitation rigidity can be improved, and a levitated body can be correctly conveyed.