INTEGRATION OF LASER WITH PHOTODIODE FOR FEEDBACK CONTROL

摘要

Photodiodes are integrally formed with vertical cavity surface emitting lasers (VCSELs) and superluminescent light emitting diodes (SLEDs) for monitoring optical radiation intensities. In different embodiments, the photodiode (40, 45, 50) is epitaxially formed in a mirror (35) of a VCSEL, non-epitaxially formed on the top of the VCSEL, non-epitaxially formed on the side of a VCSEL, or formed on the substrate (200) on the side opposite the VCSEL. A lateral injection vertical cavity surface emitting laser is also disclosed for integration with a lateral PIN photodiode. A photodiode having the same epitaxial layers as a VCSEL is also integrally formed alongside of the VCSEL. Similar devices using SLEDs are also disclosed.