Bandspannvorrichtung für einen Halbleiterproduktionsapparat

摘要

In a tape extension device for a semiconductor-producing apparatus having a device 5 for tensioning a tape 2, which is withdrawn from a roll 1, in a down-web direction above a semiconductor wafer 3, the tape extension device comprises a lateral tensioning device 6. The lateral tensioning device includes clamp means 17 for clamping each side edge of the tape in a cross-web direction and computer-controlled drive means 18 for moving the clamp means in the cross-web direction away from each other to tension the tape. The tape is then attached to the semiconductor wafer 3 and frame 4 avoiding wrinkles and a section of the tape is severed. <IMAGE>