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发明名称
摘要
申请公布号	JPH0789357(B2)	申请公布日期	1995.09.27
申请号	JP19880064702	申请日期	1988.03.19
申请人		发明人
分类号	H01L21/82;G06F17/50;(IPC1-7):G06F17/50	主分类号	H01L21/82
代理机构		代理人
主权项
地址

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