| 摘要 |
To selectively grow a P type silicon layer and a Si/GexSi1-x superlattice layer (7) under low temperature conditions in the area encircled with a groove (4), at least the side walls of which consist of silicon oxide film, which is formed in the silicon substrate. Thereby, the leak at the side of the superlattice layer can be reduced. Furthermore, by burying a metal film in the groove, the loss of light at the side of the superlattice layer (7) can be suppressed to the minimum. Thus a light receiver having silicon/germanium.silicon-mixed-crystal layer is stably formed in a silicon semiconductor substrate and optical absorption efficiency can be improved. <IMAGE> |
