Acceleration sensor for vibration detection-compensation in office-laboratory-workshop equipment

摘要

The acceleration sensor (10) has a number of piezoelectric elements (12) or one element having different regions, each element or region having a polarisation direction which corresponds to the acceleration direction to be detected. A weight (13) of insulating material is mounted to extend over the piezoelectric elements which themselves are mounted on a substrate (11). Electrical connecting devices (14) are arranged on the weight side and the substrate side of a piezoelectric element and form a series circuit between the piezoelectric elements or different regions of the one piezoelectric element. Electrodes (15) on the substrate tap the voltage across the two sides of the series connected piezoelectric elements/regions.