WAVEGUIDE TYPE OPTICAL SENSOR

摘要

PURPOSE:To facilitate optical coupling between a sensor body and an external unit by separating the incident light to the sensor body from the incident light to a grating and introducing the incident light to the grating to a predetermined position through the use of a channel waveguide thereby facilitating the alignment with high accuracy. CONSTITUTION:A light enters relatively easily into a waveguide in a waveguide substrate 1 along a waveguide having some depth and tapered on the opposite breadthwise directions. The light is introduced to the part of channel waveguide 2 in the substrate 1 where the light is coupled with channel waveguide 2 having sensor function and the total power is transferred to the sensor substrate. The transferred light advances to a stab waveguide 3 where the light begins to be diffused two-dimensionally. It is then condensed or converted into a parallel light through a grating 4 having condenser lens function and delivered at a predetermined angle to the outside of the waveguide thus realizing the sensing operation.