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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07249677(A)
申请公布日期
1995.09.26
申请号
JP19940036976
申请日期
1994.03.08
申请人
MATSUSHITA ELECTRON CORP
发明人
NAKAMURA AKIO
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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