SEALING TYPE ULTRAPRECISE FINE ADJUSTMENT DEVICE

摘要

PURPOSE:To adjust preliminary pressure and prevent breakage of a piezoelectric element. CONSTITUTION:In an ultraprecise fine adjustment device, supporting plates 2, 3 are provided on both ends of a piezoelectric element 1, and a metallic bellows 15 is provided in tension between the supporting plates so that the piezoelectric element is sealed. A pressure support 20 is provided between the piezoelectric element 1 and the metallic bellows 15 and is retained by the supporting plates. The preliminary pressure support column 20 is provided with preliminary pressure adjusting means 15a, 26. A hemisphere 5 is provided on the distal end of the piezoelectric element 1. The supporting plate has a receiving section 6 for the hemisphere 5.