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经营范围
发明名称
CARRYING METHOD IN PEELING EQUIPMENT
摘要
申请公布号
JPH07249602(A)
申请公布日期
1995.09.26
申请号
JP19940065621
申请日期
1994.03.09
申请人
ETSUCHINGU PLANT KK
发明人
UCHIYAMA SHUJI
分类号
B65G13/00;C23F1/00;C23G3/00;H01L21/027;H01L21/304;(IPC1-7):H01L21/304
主分类号
B65G13/00
代理机构
代理人
主权项
地址
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