摘要 |
PURPOSE:To eliminate the occurrence of point defects due to a foreign matter intruding in a protective film layer. CONSTITUTION:The color filter substrate is produced by forming a black matrix 21 on a transparent substrate 20, forming plural color filters 22R, 22G, 22B sectioned with the black matrix, and forming a protective film layer 23 and an electrode 24. In this process, when the color filter substrate is to be regenerated in order to suppress the production of point defects due to foreign matter 25 intruding in the protective film layer 23, the electrode 24 of the color filter substrate where the foreign matter 25 intruded in the protective film layer 23 is removed, the protective film layer 23 is ground to flatten the projection 26 due to the foreign matter 25, and then the electrode 24 is again formed. |