| 摘要 |
An array of M x N actuated mirrors for use in optical projection system comprises an active matrix, an array of M x N elastic members, an array of M x N pairs of actuating structures, an array of M x N mirrors and array of M x N pairs of supporting members. Each of the elastic members is provided with a distal and a proximal ends, the proximal end including a first and a second tab portions, the first tab and the second tab portions being separated by a retraction therebetween, the distal end including a protrusion. The protruding form each of the elastic members extends into the retrusion of a successive elastic member in the array. Each of the actuating structures is located on the first and second tab portions on each of the elastic members, respectively, wherein each of the actuating structures includes a bias electrode, a signal electrode and a motion-inducing layer therebetween. Each of the mirrors is formed on top of the elastic members. Each pair of the supporting members is used for holding each of the elastic members in place. When the pair of actuating structures deform in response to an electrical signal, the first and second tab portions on the elastic member with the actuating structures attached thereto tilt while the remainder of the elastic member, and, the mirror formed on top thereof, stays planar, thereby allowing all of the mirror to reflect the light beams. <IMAGE> |
