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发明名称
Aromatische Polyimidsilanolverbindungen und ihre Vorläufer und Polymere.
摘要
申请公布号
DE69017522(T2)
申请公布日期
1995.09.21
申请号
DE19906017522T
申请日期
1990.05.11
申请人
HUGHES AIRCRAFT CO., LOS ANGELES, CALIF., US
发明人
DOUGHERTY, THOMAS K., PLAYA DEL REY, CALIFORNIA 90293, US;GIANTS, THOMAS W., SANTA MONICA, CALIFORNIA 90403, US
分类号
G02F1/1337;C07F7/08;C07F7/10;C08G73/10;C08G77/48;C08G77/54;H01L21/027;H01L21/30;(IPC1-7):C07F7/08
主分类号
G02F1/1337
代理机构
代理人
主权项
地址
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