发明名称 |
METHOD AND APPARATUS FOR PREVENTING CONTAMINATION OF SUBSTRATE OR SUBSTRATE SURFACE. |
摘要 |
<p>A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in the high-tech industry such as in the production of semiconductors and liquid crystals. A gas coming into contact with a base material or substrate is purified by dust removing means and adsorption and/or absorption means so that the concentration of fine particles in the gas is below class 1,000 and a non-methane hydrocarbon concentration is below 0.2 ppm. Thereafter, the base material or the substrate surface is exposed to this gas. <IMAGE></p> |
申请公布号 |
EP0672445(A1) |
申请公布日期 |
1995.09.20 |
申请号 |
EP19920924872 |
申请日期 |
1992.12.02 |
申请人 |
EBARA-INFILCO CO., LTD. |
发明人 |
FUJII, TOSHIAKI, EBARA RESEARCH CO., LTD.;SUZUKI, TSUKURU, EBARA RESEARCH CO., LTD.;SUZUKI, HIDETOMO, EBARA RESEARCH CO., LTD.;SAKAMOTO, KAZUHIKO |
分类号 |
B01D46/00;B01D53/04;B01D53/26;F24F3/16;(IPC1-7):B01D46/44;B01D53/34;H01L21/02;B01D53/02 |
主分类号 |
B01D46/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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