发明名称 Multimode-laser interferometric apparatus for eliminating background interference fringes from thin-plate measurements
摘要 Fizeau interferometer that utilizes a multimode laser as a light source for testing transparent thin-plate samples. As a result of multimode linear laser operation, interference fringes are obtained only when the optical path difference between the reference surface and test surface is equal to twice a multiple of the laser's effective cavity length. By judicially selecting the multimode spectrum of operation and the effective cavity length of the laser, the interferometer may be calibrated to produce interference fringes at a workable separation between the reference and test surfaces without ghost interference fringes from the far surface of the thin-plate sample. Another embodiment of the invention alternatively utilizes two linear lasers with different effective cavity lengths to eliminate ghost interference fringes when the optical thickness of the thin-plate is equal to a multiple of one laser's effective cavity length.
申请公布号 US5452088(A) 申请公布日期 1995.09.19
申请号 US19940210671 申请日期 1994.03.18
申请人 WYKO CORPORATION 发明人 AI, CHIAYU
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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