发明名称 Method of making single layer thin film transistor static random access memory cell
摘要 A memory cell layout and method of forming a 6 transistor SRAM memory cell that achieves a reduced cell area using uncomplicated fabrication steps. In one embodiment, a six transistor (6/T) SRAM cell has two horizontal thin-film transistor (T5, T6) as load transistors, two transfer transistors (T1, T2), two latch transistors (T3, T4) and two current nodes (38, 40). In this structure all six transistors are formed in the substrate and a single polysilicon layer.
申请公布号 US5451534(A) 申请公布日期 1995.09.19
申请号 US19940355656 申请日期 1994.12.14
申请人 UNITED MICROELECTRONICS CORPORATION 发明人 YANG, MING-TZONG
分类号 H01L27/11;(IPC1-7):H01L21/824 主分类号 H01L27/11
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