摘要 |
PURPOSE:To recover a sample dropped from a measuring stage without opening a high-vacuum measuring chamber to the atmospheric air by providing a sample recovering plate for capturing the dropped sample below the sample stage rotatably and vertically movably. CONSTITUTION:A sample recovering plate 16 made of a circular 10-mesh stainless steel net is fixed to a stage rotary shaft 14 below a sample stage 10 in parallel with the stage 10 face. A sample 26 mounted on the sample tray is fed to the stage 10 from the outside by a sample conveying tool 22 via a reserve exhaust chamber 8 and mounted on a mount hole, and it is conveyed near an X-ray source 4 in sequence by the rotation of the stage 10 and analyzed. If the sample 26 is dropped on the recovering plate 16 when it is mounted on the stage 10, the rotary shaft 14 is rotated to move the sample below the conveying tool 22, then the rotary shaft 14 is lifted, and the conveying tool 22 is operated to pick up and recover the sample 26. The rotary shaft 14 is lowered and returned to the original state, and the recovered sample 26 is again mounted on the stage 10. |