发明名称 SEMICONDUCTOR DEVICE TESTER
摘要 PURPOSE: To provide a semiconductor test device having a DUT substrate connection part in which the re-constitution is simple, the electrical and mechanical reliability is excellent, the noise and cross-talk are low, and high density mixed digital and analog device to be tested is permitted. CONSTITUTION: A semiconductor device test device is provided with a circuit board 10 including a plurality of conductor paths having a signal path and a ground path, a first end part 14 comprising a conductor member which is directed to a first surface 15 of the circuit board 10 and arranged so as to be engaged with a contact 19 of a semiconductor device 21, an inside array comprising the conductor member, and a second end part 16 comprising a conductor member directed toward a second surface 17, and the conductor member is provided with an outside array to be electrically connected to the desired conductor path among a plurality of conductor paths, and a means to electrically connect a grounding block 18 to the ground pass.
申请公布号 JPH07244114(A) 申请公布日期 1995.09.19
申请号 JP19910255777 申请日期 1991.09.07
申请人 TEKTRONIX INC 发明人 JIYOSEFU EE MIERUKU
分类号 G01R31/26;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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