| 摘要 |
A stylus profiling apparatus and method maintains constant separation, and thus constant force, between a conductive cantilever beam which extends over a conductive portion of a base and which is positioned in spaced apart relation therefrom. In particular, a piezoelectric actuator is coupled to the base and is controlled to move the base relative to the free end of the cantilever beam so as to maintain constant spacing, and thus constant force, therebetween when a stylus on the free end is moved by a surface profile. A capacitor having a pair of plates, at least one of which is coupled to the piezoelectric actuator, produces an electrical signal in response to the displacement of the actuator to provide measurement of the surface profile. The base is preferably of trapezoidal cross section and includes electrical pads on one side thereof. A probe holder includes a mating shoulder and electrical contacts for cooperatively mating with the electrical pads. Thus, the probe may be slidably removed from the holder and a new probe may be slid into the holder to allow rapid removal, replacement and alignment.
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