| 摘要 |
<p>PURPOSE:To suppress increase in the resistance value even if the wiring electrode becomes long and narrow and to substantially smoothly drive a liquid crystal display by forming the wiring electrode as the laminate of the upper and lower metals of a nonlinear resistive element. CONSTITUTION:The thin film of the lower metal 2 of an MIM element of Ta is formed on a glass substrate 1 by sputtering. A lower-layer electrode 6b is formed at a position corresponding to a wiring electrode electrically independently of the lower metal 2, and an auxiliary electrode 6c is formed at another part in electrical continuity to the lower metal 2 of the MIM element. An insulating film is formed on the lower metal 2 surface as the insulating layer of the MIM element with the auxiliary electrode 6c as one formation electrode. The lower metal 2 coated with the insulating layer is patterned in a form of island. An upper metal 4 and an upper-layer electrode 6d at the part corresponding to the wiring electrode 6 are patterned in a specified shape. Accordingly, the wiring electrode 6 is formed from the laminate of the electrodes 6b and 6d of respectively the same metal as the lower and upper metals 2 and 4 of the MIM element.</p> |
