| 摘要 |
PURPOSE:To easily obtain an optical multiplexer/demultiplexer having prescribed wavelength characteristics relating to a process for producing the optical multiplexer/demultiplexer consisting of optical waveguides. CONSTITUTION:The surface of a silicon substrate 5 is provided with an under clad layer 6 and core layer 50 in lamination in the process for producing the optical multiplexer/demultiplexer consisting of a pair of the first and second optical waveguides provided with optical coupling parts in proximity in parallel by a prescribed length in a part of the respective waveguides. The optical multiplexer/demultiplexer is 10 provided with a pair of the first and second optical waveguide cores 10C, 20C having the optical coupling parts 10-1, 20-l in proximity in parallel by the prescribed length in nearly the central part by etching the core layer 50 and is provided with dummy cores 55 in proximity to the respective outer sides of th optical coupling parts 10-1C, 20-1C. The optical multiplexer/demultiplexer is then provided with first over clad layers to cover the first, second optical waveguides 10, 20 and the dummy cores 55 and thereafter, the dummy cores 55 are removed by etching. |
