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发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPH07245430(A)
申请公布日期
1995.09.19
申请号
JP19940032594
申请日期
1994.03.02
申请人
SANYO ELECTRIC CO LTD
发明人
NEMOTO MASAAKI
分类号
C01G3/00;C01G1/00;C23C14/08;C23C14/34;H01L39/24;(IPC1-7):H01L39/24
主分类号
C01G3/00
代理机构
代理人
主权项
地址
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