THIN FILM FORMING METHOD AND DEVICE THEREFOR,申请号JP19940036064-传众专利搜索

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发明名称	THIN FILM FORMING METHOD AND DEVICE THEREFOR
摘要
申请公布号	JPH07243037(A)	申请公布日期	1995.09.19
申请号	JP19940036064	申请日期	1994.03.07
申请人	ANELVA CORP	发明人	WATANABE NAOKI
分类号	C23C14/06;C23C14/34;G11B5/84;G11B5/85;G11B5/851;(IPC1-7):C23C14/34	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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