发明名称 MOCVD process using alkaline earth metal-heptane dionate compounds
摘要 Alkaline earth metal heptane dionates which have uniform evaporation properties in a vacuum and are therefore highly suitable for use in CVD synthesis for depositing layers containing alkaline earth metal useful in fields such as the production of high temperature superconductors.
申请公布号 US5451434(A) 申请公布日期 1995.09.19
申请号 US19930158374 申请日期 1993.11.29
申请人 SOLVAY BARIUM STRONTIUM GMBH 发明人 DOELLEIN, GUENTHER
分类号 C07F3/00;C07C45/77;C07C49/92;C07F3/04;C23C14/12;C23C16/18;C23C16/40;(IPC1-7):C23C16/00 主分类号 C07F3/00
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