发明名称 |
Photon controlled decomposition of nonhydrolyzable ambients |
摘要 |
A method and apparatus to decompose nonhydrolyzable ambients such as chlorofluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.
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申请公布号 |
US5451378(A) |
申请公布日期 |
1995.09.19 |
申请号 |
US19920861410 |
申请日期 |
1992.03.31 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
RUSSELL, STEPHEN D.;SEXTON, DOUGLAS A. |
分类号 |
A62D3/00;A62D3/17;A62D3/34;A62D3/35;A62D101/22;B01D53/00;B01J19/12;(IPC1-7):B01J19/12 |
主分类号 |
A62D3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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