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发明名称
MANUFACTURE OF LAMINATED SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH07245250(A)
申请公布日期
1995.09.19
申请号
JP19940060337
申请日期
1994.03.04
申请人
MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP
发明人
WATANABE MINEO;HARADA HITOSHI;SUGAWARA MAKOTO
分类号
H01L21/20;H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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