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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH07243063(A)
申请公布日期
1995.09.19
申请号
JP19940038197
申请日期
1994.03.09
申请人
TOSHIBA CORP
发明人
NUNOGAMI SHINYA
分类号
C23F4/00;(IPC1-7):C23F4/00
主分类号
C23F4/00
代理机构
代理人
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地址
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