| 摘要 |
PURPOSE:To provide a substrate cleaning apparatus which is compact in constitution and can clean well the surfaces of a substrate with brushes without lengthening a treatment tact. CONSTITUTION:Conveyers 1F, 1R are formed with more than one transfer roller l installed in the X direction. The transfer roller 1, which is connected with a two-way driving part, turns normally (or reversely) according to the driving force of the driving part to reciprocate a substrate W in the arrow direction X (horizontally). A brush cleaning part 2 is installed between the conveyer parts 1F, 1R. In the brush cleaning part 2, brushes 24, 25 are arranged respectively on the upper and lower sides of a substrate transfer route. The upper surface of the reciprocating substrate W is cleaned by the brush 24, while the lower surface is cleaned by the brush 25. |
