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发明名称
GATE BREAK
摘要
申请公布号
JPH07241888(A)
申请公布日期
1995.09.19
申请号
JP19940035507
申请日期
1994.03.07
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD;M TEX MATSUMURA KK
发明人
SUZUKI JUNICHI;IKEDA NOBUYOSHI;KUDO KAZUHITO
分类号
B29C45/02;B29C45/38;H01L21/56;(IPC1-7):B29C45/38
主分类号
B29C45/02
代理机构
代理人
主权项
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