Micromanipulator.

摘要

For micromovement of an object relative to a predetermined processing or analysing position, a micromanipulator is disclosed which can be employed, for example, for executing object movements in scanning tunnel microscopes (RTM). The micromanipulator has a plurality of movement elements (2, 2', 2"), which both support and move the object (1). For executing micromovements, the movement elements can be adjusted piezoelectrically, and the supports (3, 3', 3") can be displaced by the deformation of piezoelectric material. In order to be able to execute micromovements with the micromanipulator too, micromovements can be carried out with at least one of the movement elements (2). The support (3) of the movement element (2) itself is suitable for this. The support (3) can be inserted in a piezoelectrically deformable sleeve (7). However, it is also possible to design a partial section (14) of the baseplate (5a) to be macromovable, on which the movement elements (2a, 2a', 2") are fastened.