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发明名称
VERFAHREN UND ANLAGE ZUM CHEMISCHEN BESCHICHTEN VON EINANDER GEGENÜBERLIEGENDEN OBERFLÄCHENBEREICHEN EINES WERKSTÜCKES.
摘要
申请公布号
AT127536(T)
申请公布日期
1995.09.15
申请号
AT19900115447T
申请日期
1990.08.11
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
THIEBAUD, FRANCIS, DR.;ZIMMERMANN, HEINRICH, DR.
分类号
C23C16/50;C23C16/458;C23C16/505;C23C16/509;H01L21/00;(IPC1-7):C23C16/50;H01J37/32;C23C16/04;G02B1/10;C23C16/44
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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