| 摘要 |
An integrated module with a heated reservoir (44) to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves (20, 22) and a proportioning pressure valve (21) for controlling the flow of the vapor from the reservoir (44) are mounted on the module (41A) for simple conduction heating of the valves. A capacitance manometer (19) also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistent performance and reliability are obtained.
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