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发明名称
Speicherbehälter.
摘要
申请公布号
DE69021531(D1)
申请公布日期
1995.09.14
申请号
DE19906021531
申请日期
1990.12.28
申请人
EBARA CORP., TOKIO/TOKYO, JP
发明人
MATSUMURA, MASAO, CHIGASAKI-SHI, KANAGAWA-KEN, JP
分类号
B65G1/133;B65G1/00;B65G1/02;B65G1/04;B65G49/07;H01L21/673;H01L21/677;(IPC1-7):H01L21/00;B65G1/12
主分类号
B65G1/133
代理机构
代理人
主权项
地址
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