VERFAHREN ZUR HERSTELLUNG EINES DüNNSCHICHTOXYDSUPRALEITERS.,申请号DE1989622734T-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG EINES DüNNSCHICHTOXYDSUPRALEITERS.
摘要
申请公布号	DE68922734(T2)	申请公布日期	1995.09.14
申请号	DE1989622734T	申请日期	1989.03.15
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP	发明人	NODA, ETSUO, KANAGAWA-KEN 251, JP;SUZUKI, SETSUO 22-3-2-203, YAYOIDAI IZUMI-K, KANAGAWA-KEN 245, JP;MORIMIYA, OSAMI, OHTA-KU TOKYO 146, JP;HAYASHI, KAZUO, OHTA-KU TOKYO 143, JP
分类号	C23C14/00;C23C14/08;C23C16/40;H01L39/24;(IPC1-7):C01B13/14;C01G3/00;C23C14/24;H01B13/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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