| 摘要 |
PURPOSE:To correct a pattern by irradiating the pattern material layer part corresponding to the defect of the pattern with laser beam. CONSTITUTION:Laser beam is irradiated from the part above defect 9 of pattern 8 on substrate 7 through pattern materials 6. Laser beam is condensed by a lens to melt materials 6, and the surface tension is utilized to print materials 6 to the substrate, thereby correcting defect 9. Thus, pattern materials 6 are melted or are made into gas by laser beam, and materials 6 are printed to the substrate, so that an effective correction can be performed. |
