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发明名称
Semiconductor device and manufacturing method thereof.
摘要
申请公布号
EP0299505(B1)
申请公布日期
1995.09.13
申请号
EP19880111399
申请日期
1988.07.15
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
OKUMURA, KATSUYA
分类号
H01L29/78;H01L21/336;H01L29/08;H01L29/423;(IPC1-7):H01L29/08;H01L29/10
主分类号
H01L29/78
代理机构
代理人
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地址
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