| 发明名称 |
Process and device for fabricating thin films. |
| 摘要 |
<p>This invention provides a process for producing thin films which comprises the step of dissolving one or two or more thin film materials into a solution or a dispersion, spraying the same from a spray nozzle provided for each component onto a substrate in a high vacuum vessel and allowing the same to deposit thereon, and then heating the same. <IMAGE></p> |
| 申请公布号 |
EP0671219(A1) |
申请公布日期 |
1995.09.13 |
| 申请号 |
EP19940309917 |
申请日期 |
1994.12.30 |
| 申请人 |
RESEARCH DEVELOPMENT CORPORATION OF JAPAN;AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY |
发明人 |
HIRAGA, TAKASHI;MORIYA, TETSUO, C/O ELECTROTECHNICAL LAB. |
| 分类号 |
C23C14/12;B05D1/02;B05D3/04;C23C26/00;(IPC1-7):B05D1/02;C23C16/44;C23C4/12 |
主分类号 |
C23C14/12 |
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