System and method for optical interferometric measurement.
摘要
<p>The invention is an on-line manufacturing process control system and method using a twin or dual beam heterodyned optical interferometer as the monitor of changes in the surface characteristics of an object during the manufacturing process. <IMAGE></p>
申请公布号
EP0671601(A2)
申请公布日期
1995.09.13
申请号
EP19950102557
申请日期
1995.02.23
申请人
MINNESOTA MINING AND MANUFACTURING COMPANY
发明人
ROBINSON, GLEN M.;CARLSON, TIMOTHY B.;PETERSON, RICHARD W.;DENZER, STEVEN M.;GROSCHEN, ROBERT P.;SCHMAINDA, MICHAEL J.
