发明名称 |
APPARARUS AND METHOD FOR PRODUCING GASEOUS IONS BY USE OF X-RAYS, AND VARIOUS APPARATUSES AND STRUCTURES USING THEM. |
摘要 |
<p>An apparatus and method for producing positive and negative ions and/or electrons in a gas of any atmosphere without producing dust, a method and structure for neutralizing a charged body in a short period of time and for completely preventing static electricity from being generated, and various apparatuses and structures, such as a conveyor, wet bench, and clean room, which use the neutralizing method and structure. The gaseous ion producing apparatus produces positive and negative ions and/or electrons in a gas by irradiating, with electromagnetic waves in a soft X-ray region, the gas under a high pressure, atmospheric pressure, or reduced pressure. In the neutralizing structure an X-ray unit is arranged at an appropriate place to apply the electromagnetic waves in a soft X-ray region to the atmospheric gas surrounding a charged body. <IMAGE></p> |
申请公布号 |
EP0671871(A1) |
申请公布日期 |
1995.09.13 |
申请号 |
EP19940908129 |
申请日期 |
1993.08.13 |
申请人 |
TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA;HAMAMATSU PHOTONICS K.K.;OHMI, TADAHIRO |
发明人 |
OHMI, TADAHIRO;INABA, HITOSHI;IKEDO, TOMOYUKI |
分类号 |
H05F3/06;(IPC1-7):H05F3/06;H01L21/68;H01L21/02;A01G7/00;E04H5/02 |
主分类号 |
H05F3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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