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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07240466(A)
申请公布日期
1995.09.12
申请号
JP19940031700
申请日期
1994.03.02
申请人
FUJITSU LTD
发明人
NIIFUKU FUMIHIKO
分类号
H01L21/285;H01L21/28;H01L21/3213;H01L21/768;(IPC1-7):H01L21/768;H01L21/321
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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