| 摘要 |
A scanning microscope comprises a system (2, 3, 4) for concentrating a radiation beam from a radiation source (1) to form a scanning spot on an object (5). The radiation from the scanning spot is projected by a second optical system (6, 7) onto a radiation-sensitive detection system comprising two detectors (8, 9). The signals from the detectors (8, 9) are combined into a difference signal 11 and a sum signal 13. These two signals are formed into a complex composite signal which is transferred to the frequency domain in a circuit 22 via a Fourier transform. By performing suitable filtrations on the composite signal in the frequency domain in the circuit 23, quantitative measurements can be performed on the amplitude and phase structure of the object 5. These measurements may be visualized after an inverse Fourier transform in the circuit 24 via an image-processing system 25 on an image display unit 26.
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