发明名称 METHOD OF MANUFACTURING QUANTUM FINE WIRE STRUCTURE
摘要 PURPOSE:To control the period of the quantum fine wire structure by forming a semiconductor carrier confinement layer on a specific high index surface substrate using organic metallic vapor growing method. CONSTITUTION:The quantum fine wire structure is composed of a high index surface substrate 11, a semiconductor carrier confinement layer 12 as well as a lower semiconductor barrier layer 13 and an upper semiconductor barrier layer 14 holding the confinement layer 12. As the high index surface substrate 11, a GaAs (n11) substrate (where, n=any one out of 2-7) is used. At this time, the quantum fine wire structure can be formed by growing AlGaAs as the semiconductor barrier layers 13, 14, GaAs, InGaAs or GaAsSb as the semiconductor confinement layer 12. During the growing step, the period of the periodical structure can be controlled by the film thickness, growing temperature of the semiconductor carrier confinement layer 12, and the kind of applicable substrate 11.
申请公布号 JPH07240380(A) 申请公布日期 1995.09.12
申请号 JP19940032182 申请日期 1994.03.02
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 RIHIYARUTO NEETSUERU;TENMYO JIRO;TAMAMURA TOSHIAKI
分类号 H01L29/06;H01L21/205;(IPC1-7):H01L21/205 主分类号 H01L29/06
代理机构 代理人
主权项
地址