| 摘要 |
<p>PURPOSE:To transfer a wafer positively and efficiently from a beaker to a carrier by securing a wafer carrier in the water. CONSTITUTION:A carrier stopping part 1 having a pawl 11 at the upper part is planted on a bottom plate 3, on one end side, for mounting a water carrier. The bottom plate 3 is provided, on the other side, with a movable engaging part 2 having a substantially reverse U-shaped inclining engaging plate 21 and weights 22a, 22b, each having a center of gravity shifted to the carrier stopping part 1 side, are provided at the movable engaging part 2. The wafer carrier is secured while being held between the carrier stopping part 1 and the movable engaging plate 21.</p> |
