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发明名称
VERTICAL VAPOR GROWING DEVICE
摘要
申请公布号
JPH07240376(A)
申请公布日期
1995.09.12
申请号
JP19940055188
申请日期
1994.02.28
申请人
SUMITOMO SITIX CORP
发明人
NAKAHARA SHINJI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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