| 摘要 |
PURPOSE:To rapidly conduct surface finishing of a surface plate with little wear of the surface plate to stabilize surface plate surface accuracy by arranging a base table on a bar frame via an inclination angle adjusting device, and also providing a displacement sensor on a moving body. CONSTITUTION:After lathe turning, a flatness shape of a lower surface plate 12 is first measured, based on the result thereof a bolt 62 is advanced/retracted vertically by screw-engagement operation to swing a base table 41 up and down with a pair of ball support tools 61 as fulcrums so as to integrally incline a moving body 44 and the like, and inclination of a surface finishing device 40 is thereby finely adjusted. A displacement sensor 65 is fitted to a tip holding tool 45, and while a measuring element thereof is in contact with an upper surface of the lower surface plate 12, the moving body 44 is moved in the radial direction so as to measure inclination of the surface finishing device 40 with respect to the flatness shape of a surface of the lower surface plate 12. In the case where this measured value is not a specified inclination value, an inclination angle adjusting device 60 is again operated to finely adjust the inclination of the surface finishing device 40, and the inclination of the device 40 is measured by means of the displacement sensor 65. |
