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发明名称
SEMICONDUCTOR CHIP TEST SYSTEM
摘要
申请公布号
JPH07240444(A)
申请公布日期
1995.09.12
申请号
JP19940053176
申请日期
1994.02.25
申请人
AGING TESUTA KAIHATSU KYODO KUMIAI
发明人
IKEDA AKIO
分类号
G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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